instead of surface sacrificial layer and bulk micromachining technique, using polymer as thermal isolation material decreases cost and improves yield.
以聚合物材料作为绝热材料,避免了表面牺牲层工艺和体加工技术,降低了成本、提高了成品率。
compared with bulk micromachining and surface micromachining, the advantages of porous silicon technology are presented in detail.
与体微机械和表面微机械加工技术相比,多孔硅技术的优势被详细阐述;
a novel electrostatic actuated deformable mirror with continuous facet is designed and fabricated by using silicon bulk micromachining technology.
基于体硅微加工技术设计并制作了一种新型的采用静电驱动的连续面型可变形反射镜。
the mirror and v-grooves are fabricated in a one-lever mask by bulk micromachining of (100) monocrystalline silicon with anisotropic wet etchants.
微反射镜和v字型光纤槽通过对(100)单晶硅的各向异性腐蚀实现。
this paper investigates one kind of micro heat pipe arrays(mhpa), which are fabricated by advanced silicon bulk micromachining and anodic bonding technology.
介绍了一种基于硅体加工技术以及阳极键合技术的微热管阵列。
at last, the z-axis micromachined gyroscope was fabricated in a bulk micromachining process, the difference between design and fabrication has been analyzed.
最后,实际进行z轴微机械陀螺的流片加工,分析了检测的结果,比较验证了陀螺集成设计方法。
a novel tuning fork micromachined gyroscope, based on bulk micromachining technology, is presented.
设计了一种基于体微机械加工技术的新型音叉式微机械陀螺。
this paper presented one single chip micro inertial measurement unit based on ordinary bulk micromachining process such as dissolved wafer process.
论文基于普通的体硅工艺设计实现了一个单片集成式硅微惯性测量组合。