The ion beam optics of a microwave ion gun for a focused ion beam (FIB) system is investigated numerically in this article.
用数值模拟方法研究了聚焦离子束系统中微波离子枪的束光学性能。
Then, the electrically charged atoms are shot by an ion gun at an angle that brushes aside many of the carbon atoms on the surface—to leave lines of remaining carbon atoms.