ion implantation
[电子] 离子注入
2025-10-31 22:11 浏览次数 8
[电子] 离子注入
ion n implantation gettering离子注入吸除
ion injection离子注入
all ion-implantation全离子注入
lithium ion-implantation锂离子注入
ion n implantation annealing离子注入后退火
boron ion-implantation硼离子注入
Ion n implantation离子注入
ion n implantation profile离子注入分布图
ion double implantation离子双注入
Because of the effect of energy particles on the amorphous films, ion implantation action was produced and nitrogen content in the surface was increased.
载能粒子对非晶薄膜的作用,产生氮离子注入效应,使表层的含氮量增加。
The present invention is directed to accounting for crystal cut error data in ion implantation systems, thereby facilitating more accurate ion implantation.
本发明涉及解决在离子植入系统中的晶体切割误差数据,由此易于更準确的离子植入。
The interactions between incident particles and solids in ion implantation have been investigated based on the generalized Langevin equation of classical dynamics.
本文用经典力学中推广的朗之万方程研究了离子注入中入射离子与固体的相互作用。
In this thesis, ion implantation has been used to form the waveguide and the performance of the waveguide has been studied in order to obtain the optimal fabrication conditions.
在本论文中,我们即采用了离子注入方法来制备光波导,研究所制备的波导的性能,以优化制备条件。
Now, the present ion implantation technology, especially ion implantation equipment and systems, can not meet the needs in the manufacturing of deep submicron devices and circuits.
就目前而言,已有的离子注入技术(包括离子注入设备系统)尚不能满足甚亚微米器件和电路制造的需要。
The prospects of developing ion implantation technique are forecasted in this paper.
文末还对进一步发展离子注入的前景做了展望。
The surface modification of 316 austenitic stainless steel has been investigated by plasma-based low-energy ion implantation apparatus at various temperatures and working atmospheric pressure.
采用等离子体基低能离子注入装置在不同注入温度、气压条件下氮离子注入316奥氏体不锈钢。
In this paper, magnesium alloy AZ31 has been treated by nitrogen-plasma based ion implantation (N-PBII). And we deposited DLC on a part of the nitrogen-implanted samples.
本文用等离子体基离子注氮技术(N -PBII)对AZ31镁合金进行了表面改性处理,并在部分注氮样品上沉积dlc膜。
The results show that the dynamic hybrid ion implantation deposition technology has remarkable results for improving the performance of combination between film and silicon substrate.
对比分析结果表明,动态混合离子注入沉积工艺对提高膜层与基体的结合性能效果显着。
This result is just opposite from the ion implantation enhanced etching which was reported by many authors under wet etching.
这一结果与所报道的离子注入增强腐蚀的结果正好相反。
A theoretic model for prediction of sample temperature during plasma based ion implantation was established, and computer simulation was done with the model.
建立了等离子体基离子注入过程中试样温度预测的理论模型,应用这个模型进行了一系列数学模拟。
The characteristics of ion implantation is described, and the mechanism and application of ion implantation on surface modification of high polymer material is outlined.
叙述了离子注入技术的特点,着重介绍了其在高分子材料表面改性中的机理和应用。
This method would be very helpful to the design of practical plasma source ion implantation processes.
这一分析方法对实际等离子体源离子注入应用具有重要的指导作用。
The technology of ion implantation not only can change surface properties of materials but also can improve qualities of metallic products.
离子注入技术不仅能改变材料的表面性能,电能够提高金属产品质量。
A new method for the acceleration of MD (molecular dynamics) simulation of ion implantation into crystalline targets is presented.
提出了一种用于分子动力学(MD)模拟晶体靶材料中离子注入的加速算法。
Furthermore, application of ion implantation to strengthening surface of precision bearing race has been studied.
对进一步应用离子注入强化精密轴承表面的工作做了试验研究。
Antistatic modified mechanism of ion implantation and electron beam is reviewed in this paper. The selective principle of optimum modified technological conditions is provided.
本文对离子注入和电子束的抗静电改性机理进行了分析,提出了选择最佳改性工艺条件的原则。
The effect of titanium ion implantation dosage on the corrosion behaviors was discussed.
讨论了钛离子注入剂量对铅及铅-锑合金耐蚀能力的影响。
The effect of improving wear resistance by ion implantation depended strongly on the ions, implanting dose, implanting energy and implanting temperature.
离子注入对材料表面耐磨性能改善的效果取决于注入离子的种类、注入剂量、注入能量和注入温度。
The plasma source ion implantation device consists of pulsed negative high voltage power, hot cathode arc discharge system, vacuum chamber and target stage, vacuum system and monitor system.
等离子体源离子注入装置由脉沖负高压源系统、热阴极弧放电系统、真空室及样品台、真空系统和监测系统等五部分组成。
The ion implantation method has provided a effective and new process for improving the performance of synthetic diamond and its tools.
离子注入法为提高金刚石和金刚石工具性能提供了一条有效的新途径。
The physical effects of high dose ion implantation are discussed. The formation process of SIMOX materials and their various applications are described.
讨论了高剂量注入的物理效应,介绍了利用高剂量氧注入硅合成SIMOX材料的物理过程以及SIMOX技术的多种应用。
Meanwhile, Developed ionic beam machine with multiple functions for the ion implantation into the material of aero-bearing solved the problem of non-uniformity implantation on spherical surface.
同时,针对离子注入航空轴承而研制的离子束多功能机,解决了球面无法均匀注入的难题。
A new plasma immersion ion implantation (PIII) technique was employed for implanting nitrogen ions in steel 45. The composition, microstructure and property of the implanted layer were analyzed.
采用等离子体浸没式离子注入对45钢进行氮离子注入。对注入表层的成分、组织和性能进行了分析。
In this paper an ion implantation method is introduced to increase the photoferroelectric image storage sensitivity of PLZT.
本文介绍用离子注入方法提高光敏度。
The present situations of applying ion implantation technique in metallic materials are reviewed.
本文评述了在金属材料领域中应用离子注入技术的现状;
The work piece could do ion implantation again and gain enhancing the effect after each action.
强化后的工件使用后能够再次离子注入,效果显着。