英语释义

1. the removing (as in drilling, planing, or shaping) of small amounts of material (such as metal) by action other than that of a sharp-edged tool
micromachining done with an electron beam

片语

tivated micromachining电子束显微机械加工

Micromachining process微机械工艺

micromachining processing硅微机械加工

laser micromachining激光微型工

silicon micromachining微加工技术

bulk micromachining体微加工

o Micromachining显微机械加工

Micromachining Technologies加工技术

precise micromachining精细微加工

英汉例句

• the measuring results of the above sensors indicate that the micromachining is very important to improve their performances.

  传感器性能的测试结果表明了微机械加工对提高传感器性能的重要性。

• porous silicon used as a sacrificial layer has some important applications in surface micromachining technology.

  多孔硅作为一种牺牲层材料，在表面硅微机械加工技术中有着重要的应用。

• using micromachining technology, we also integrated micro-heater and temperature sensor on the chip .

  利用微加工技术，我们还将微加热器和温度传感器集成到本芯片上。

• compared with bulk micromachining, the surface micromachining has the advantages of low manufacturing cost and easy integration with cmos circuits.

  在加工工艺方面，与体微机械加工相比表面微机械加工具有工艺简单，容易与cmos电路集成等优点。

• periodic microripple structures were formed on the sample surface after micromachining on cr-coated glass and fused silica by trains of femtosecond laser pulses from the oscillator.

  利用飞秒激光振蕩器产生的脉沖对镀有铬层的玻璃和石英基片进行微加工，发现两种样品表面均有波纹状的微突起结构产生。

• this paper mainly discusses a micromachining technology used during the fabrication of the twin isle structure polysilicon pressure sensor.

  详细讨论了双岛结构多晶硅压力传感器制作过程中的一种微机械加工技术。

• versatile micromachining methods can be used for membrane fabrication.

  通用的微机械加工方法可以用于膜制造。

• rf mems filters using surface micromachining technology are new devices.

  微波mems（rf-mems）滤波嚣是一种基于硅微加工技术的新型器件。

• using bulk micromachining and silicon bonding we can achieve high-performance full-silicon sandwich accelerometer.

  采用体微机械加工技术和硅硅键合技术可以实现高性能的加速度传感器。

• this paper presents a low cost mems variable optical attenuator(voa) fabricated by a novel bulk-silicon micromachining technology for the optical communication applications.

  介绍了一种采用新型体硅微机械加工工艺研制的低成本光通信用微机械可变光衰减器。

• a novel tuning fork micromachined gyroscope, based on bulk micromachining technology, is presented.

  设计了一种基于体微机械加工技术的新型音叉式微机械陀螺。

• mechanism, characteristic and application of excimer laser micromachining are introduced.

  介绍了準分子激光微加工的机理、特点和应用。

• a silicon integrated thin-film microelectrode device was developed by using silicon micromachining techniques.

  提出用发展中的硅微机械加工技术设计制作硅一体化薄膜微电极器件。

• the design and fabrication of a novel deformable mirror based on silicon micromachining technology was presented in this paper.

  给出基于硅微加工技术的一种新型可变形反射镜的设计和加工方法。

• the micromachining process like photolithograph, electroplate and sputtering etc is adopted to fabricate the stator of mgelr.

  采用了光刻、电镀、溅射等微细加工工艺制造了mgelr的定子。

• the pixel thermal-isolate structure design and the device micromachining processes are the core issues of the resistor array dirsp devices.

  阵列单元的绝热结构设计以及器件的微细加工工艺是研制电阻阵列红外场景产生器的核心问题。

• a novel electrostatic actuated deformable mirror with continuous facet is designed and fabricated by using silicon bulk micromachining technology.

  基于体硅微加工技术设计并制作了一种新型的采用静电驱动的连续面型可变形反射镜。

• some commonly used micromachining technologies are introduced, few examples are also shown to illustrate the structure and performance of rate and acceleration sensors used these technologies.

  介绍了几种在传感器制作中常用的微机械加工工艺，举例说明用微加工技术制作的角速率传感器及加速度传感器的结构及性能。

• the patternized micromachining method can be widely applied to the aspects in the design and preparation of optical devices based on the colloid crystal, etc.

  本发明所述的胶体晶体的微加工图案化技术广泛地应用于基于胶体晶体的光学器件的设计和制备等方面。

• this paper examines the possibility and necessity of using micromachining technology for sensor manufacturing.

  讨论利用微机械加工技术制作传感器的可能性、必然性。

• femtosecond laser micromachining has many potential applications due to its advantages, such as limited heat-affected zone and more precision machining.

  飞秒激光微加工具有热影响区小和加工精度高的特点，在激光微加工领域具有潜在的应用价值。