This instrument has been used for measuring the sheet resistance distribution for Boron diffusion chip.
并用该仪器测定了硼扩散片的薄层电阻分布。
A new method for measuring sheet resistance of semiconductor using four-point probe has been developed.
本文介绍用四探针技术测量半导体薄层电阻的新方案。
Then, the effects of heat treatment and temperature on the chemical composition and sheet resistance of the prepared films were investigated by XRD, EDXS and sheet resistance measurements.