an automatic focusing technology of sem image-vision based on image analysis is presented for acquiring distinct sem images quickly and accurately.
为了快速準确地获取清晰的sem显微图像,提出了一种基于图像分析的sem显微视觉自动聚焦技术。
based on detecting focus error , an automatic focusing unit has been given.
要保证测量光聚焦在待测表面,自动聚焦控制是非常重要的。
an automatic focusing control system for acquisition of ccd image is introduced.
介绍一种应用于ccd图像采集识别的自动聚焦控制系统设计。
the invention also provides an automatic focusing method.
本发明还提供一种自动对焦方法。
in order to improve the precision of an image measurement system, an automatic focusing method based on fuzzy control and image processing is proposed.
为提高图像测量系统的精度,提出了一种由模糊控制与图像处理技术实现的自动聚焦方法。