in this paper, the development process and the application of lcvd technology in growing the metal film, dielectric film and semiconductor film in during the past ten years are reviewed.
the numerical result shows that there is self similarity in the reflectivity of dielectric film system.
结果表明,多标分形介质膜系的反射率具有分形的自相似特征。
a good interface characteristic can be maintained, and a leakage current of a dielectric film can be decreased.
提供一种使用可以降低绝缘膜的泄漏电流的金属硅酸盐膜等的半 导体器件及其简单制造方法。
disclosed herein is a method for forming an interlayer dielectric film for a semiconductor device by using a polyhedral molecular silsesquioxane.
此处公开了一种使用多面体分子倍半硅氧烷形成半导体器件所用的层间电介质膜的方法。
the phenomenon of fingerprint discharge along the dielectric film surface is observed by dynamic method.
利用动态指纹提取方法观察到了手指在介质层表面产生的沿面放电现象。
the dual belt vacuum applicator mod. 725/db has been designed for in-line vacuum application of primary imaging dry film, solder mask, dielectric film and copper foil for sbu technology.