the electrostatic actuator has a top electrode, a bottom electrode, and an insulating film disposed between the top electrode and the bottom electrode.
上述静电型致动器具有上部电极、下部电极及在上述上部电极和上述下部电极间配置的上述绝缘膜。
according to the calibration principle of electrostatic actuator and the mechanics of piezoelectric ceramic, this thesis developed auto-calibration method of hydrophone.
介绍了微执行器的驱动方式及各自的优缺点、静电梳齿结构的特点和应用以及静电梳齿结构的工作原理。
in one embodiment a method of making an electrostatic actuator includes: forming a first conductor (66) over a first substrate (80) to form a first structure (50);