2026-03-21 20:11 浏览次数 17
微波ECR
Preparation of Silicon Thin Films on Glass Surface Using Microwave ECR Plasma Source Enhanced Magnetron Sputtering
用微波ECR等离子体增强磁控溅射沉积法在玻璃上镀膜
Simulation and Design of Microwave ECR Large-area Magnetic Field
微波ECR大面积磁场的模拟与设计