a new diagnostic method using optical emission spectroscopy to determine electron temperature in inductively coupled nitrogen plasma is proposed.
本文提出了一种新的利用发射光谱测量感应耦合氮等离子体的电子温度的诊断方法。
the distribution of radicals in chf3/c6h6 electron cyclotron resonance (ecr) plasma was investigated by an actinometric optical emission spectroscopy (aoes).
使用光强标定的发射光谱(aoes)测量了chf3/c6h6混合气体的微波电子回旋共振(ecr)放电等离子体中基团的分布状态。
optical emission spectroscopy (oes) is used to diagnose the active species emission in the helicon-)wave-)plasma-)enhanced chemical vapor deposition of nanocrystalline silicon.
利用光学发射谱技术对螺旋波等离子体化学气相沉积纳米硅薄膜的等离子体内活性粒子的光发射特征进行了原位测量。
very high frequency (vhf) plasma and its glow discharge mechanism during the deposition of μc si:h film have been studied by means of optical emission spectroscopy (oes) technique in this paper.
采用光发射谱(oes)测量技术,对不同制备条件下的甚高频(vhf)等离子体辉光进行了在线监测。