investigation on emission characteristics of radio frequency glow discharge optical emission spectrum for multi elements in middle-low alloy steel;
研究了不同含量的硅元素和热处理工艺对中碳低合金钢的组织与性能的影响。
the optical emission spectrum of r. f. plasma during amorphous silicon based film etching in cf4 gas is detected.
用该系统检测了仅用cf4作为刻蚀气体刻蚀非晶硅基薄膜的等离子体光发射谱。
the vibrational temperature and the gas temperature at plasma root and tip were studied by using optical emission spectrum at different argon gas flow.
利用发射光谱法,研究了等离子体炬弧根和弧梢处的气体温度和振动温度,以及它们随气体流量的变化。