the large field projection lithography lens is a special optical lenses form, which put an high demands on the design and processing both for mechanical and optical.
大视场投影光刻物镜是光学系统中的一种特殊的形式,其设计加工要求高。
the calculative method of the large field projection lithography lens is presented, and on the distortion measuring setup which is accomplished, distortion measurement of 8 inch wafer is completed.