the laser direct writing(ldw) system svgldw 04 with a projection optical system and a spatial light modulator(lcd-slm) can expose a reduction pattern directly on a photoresist plate.
as it communicates, the numerical value of the aperture of the projection optical system (na) scanner composes 1,30 a€「 maximum value on the branch as a whole.」
因为它传达,数值孔径的投影光学系统(na )的扫描器构成1,30 a € “的最高值对科作为一个整体。