in this paper, a novel method for refractive microlens array fabrication is introduced.
介绍了一种制作折射型微透镜列阵的新方法,其主要思想参考了灰阶掩模法。
the principle of the method and the design model of refractive microlens are described. the effects of fabrication parameters on the quality of the microlens are discussed.
本文详细阐述了光刻热熔法的基本原理及微透镜设计方法,并讨论了工艺参数对微透镜列阵质量的影响。
in this paper, a novel method for refractive microlens array fabrication is introduced. its main idea is similar to that of gray-scale mask method.
介绍了一种制作折射型微透镜列阵的新方法,其主要思想参考了灰阶掩模法。
the results on fabrication of refractive microlens arrays using heat forming and reactive ion beam etching (ribe) techniques are presented.
提出一种微透镜阵列复制的新方法反应离子束蚀刻法(ribe)。