the heating equipment of vacuum sputter coating apparatus always sparks during sputtering, using metal-screening and surface earth can solve this problem well.
真空溅射镀膜设备中加热装置在镀膜时常出现打火现象,本文采用金属屏蔽和外壳接地的方法很好地解决了这一问题。
vacuum sputter coating has better stability than smearing film while smearing film has better response electric characteristics than vacuum sputter coating.
真空镀膜稳定性比涂膜好,涂膜的响应、导电性比真空镀膜好。
the s-gun are budding young writers as sources of vacuum sputter coating, it is belong to magnetron sputter.
枪是真空溅射镀膜源的后起之秀,属于磁控溅射。
in this paper, based on the discussion about fundamental condition of vacuum sputter coating technology abnormal glow discharge, the requirements for supply are expounded;
本文在论述真空溅射镀膜的工艺基本环境——异常辉光放电的基础上,阐述了电源的几点要求;