The invention provides an ion pipe with a plurality of ion beam extraction holes, so that the ion beam current density becomes uniform.
本发明提供一种排列有多个离子束引出孔的离子管,使得离子束电流密度变得均匀。
The invention provides an ion pipe and ion beam extraction method, wherein the ion pipe is arranged with a plurality of ion beam extraction holes, so that the ion beam current density becomes uniform.
本发明提供一种离子管及离子束的引出方法,离子管排列有多个离子束引出孔,使得离子束电流密度变得均匀。
At a certain electric field ratio, five electrode, systems could be used to change the ion beam current and the beam energy to a certain extent.
在一定电场强度比下可以用五电极系统在一定范围内改变束电流或束能量。
In a four-electrode system, changing the electric field ration only slightly changes the ion beam current at a certain beam energy.
在四电极系统中在一定束能量下改变电场强度比仅轻微地改变束电流。