an integrated temperature and humidity sensor consisting of the silicon diode and the polyimide-based capacitive humidity sensor has been developed.
研制成由硅温敏二极管和聚酸亚胺湿敏电容集成的温湿度传感器。
a study on the performance of a cmos capacitive humidity sensor is presented.
提出了一种cmos电容式湿度传感器特性研究方案。
this paper introduced the measurement method of capacitive humidity sensor complex number voltage;
介绍了电容式湿度传感器复数电压法测量方法;
the results show that this signal processing designed for capacitive humidity sensor has the features of low price, stable performance, and high precision with high practical value.
试验结果表明,采用此信号处理方法设计的电容式湿度传感器具有价格低廉、性能稳定、测量精度高等特点,具有很高的实用价值。
considering the study status of sensors and the requirement of on-line monitoring, the polyimide-based capacitive humidity sensor is selected as moisture sensor.
结合目前湿度传感器的研究现状,以及在线监测的具体要求,选择了聚酰亚胺薄膜电容式湿度传感器作为微水含量监测传感器。