A new structure silicon piezoresistive micromachined accelerometer has been designed, fabricated and tested.
设计、制造并测试了一种新结构硅微机械压阻加速度计。
They are based on the principle of silicon piezoresistive effect, mobility change, and variable capacitance respectively.
各部分分别基于半导体压阻效应、电阻迁移率变化、极板间电容变化为原理制作而成。
A silicon piezoresistive pressure sensor based on MEMS technology SP12 is applied to be a unit in the tire pressure monitoring.
采用了基于MEMS技术的硅压阻式压力传感器SP12作为轮胎压力的检测单元,PIC16F628A作为信号控制处理与发射单元。
The principle, specifications and performance of the silicon piezoresistive element are presented.
介绍了桥式硅压阻器件的工作原理、性能指标和工作特点。
This paper is presented for the intelligence pressure sensor of the silicon piezoresistive type to introduce its microcomputer testing, operation process and controlling parts.
本文主要介绍智能化硅压力传感器的微机检测、运算处理和控制。
This paper introduces hot wire, ultrasonic and silicon piezoresistive solid orthogonal wind sensors, and compares the performance of the three wind sensors.
介绍了热线式、超声波式、硅压阻固态正交式三类测风传感器,并对这三类测风传感器的性能进行了比较。
This paper introduced the design and development of silicon piezoresistive high frequency dynamic pressure sensor which used in the measurement of shock wave superpressure.
阐述了用于沖击波超压测量的压阻式高频动态压力传感器的设计与开发。
Based on the fabrication process of silicon piezoresistive sensors and the design of subsequent conditioning circuit, the measures for reducing the temperature effects on the sensors were discussed.
基于硅压阻式传感器的工艺过程与后续电路设计,讨论了减小其温度影响的措施。
A silicon piezoresistive sensor is applied here to in-situ record the curing stress profile, the distributions of the residual stress and the stress evolution profile during thermal treatment.
利用硅压阻传感器实时原位地记录粘接剂固化过程中的应力变化和残余应力的分布状况,以及在热处理过程中应力的演化过程。
This paper introduced the design and development of silicon piezoresistive high frequency dynamic pressure sensor.
阐述了压阻式高频动态压力传感器的设计与开发。
The pressure sensor is one of the core components in radiosonde. There are still some deficiencies in traditional silicon piezoresistive sensors.
气压传感器是探空仪中的核心部件之一,传统的硅压阻传感器应用于探空仪中还存在着一些不足。