the modulation principle, the theory of light coupled area, a optical profilometer with a single mode fiber probe and experiment results are detailed.
对单模光纤探针式轮廓仪的实验系统进行了介绍, 最后给出了实验结果和误差分析。
a non-scanning, non-interferometric, three-dimensional (3d) optical profilometer based on geometric optics, critical angle principle, and the use of a charge-coupled device (ccd) camera is presented.
基于几何光学以及临界角度原理,利用电荷耦合器件(ccd)相机的算法,本文设计了一个非相干、非扫描的三维光学表面形貌测量仪。
the optical profilometer provides a sub-micron measuring range with nanometer resolution and can be used to measure roughness or surface defects in real time.
这种表面形貌测量仪可以实现米光学测量范围和并达到纳米分辨率,可以用来对表面粗糙度和表面缺陷进行实时测量。