in this paper, morphologies of poly crystal line diamond film and epitaxial single-crystal diamond film by microwave plasma cvd method were reported, the causes of these morphologies were analyzed.
本文给出了微波等离子体化学气相沉积多晶金刚石薄膜及外延单晶金刚石薄膜的各种形貌,并对这些形貌的形成做了理论分析。