plasma etcher中文,plasma etcher的意思,plasma etcher翻译及用法

2026-10-18 07:25 浏览次数 33

plasma etcher

[ˈplæzmə ˈetʃə]

A plasma etcher, or etching tool, is a tool used in the production of semiconductor devices. A plasma etcher produces a plasma from a process gas, typically oxygen or a fluorine-bearing gas, using a high frequency electric field, typically 13.

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