By Fourier transform, produces a fast and accurate calculation for dose precompensation in proximity effect correction for electron beam lithography.
将付里叶变换法运用于电子束曝光的邻近效应校正中,形成了快速、準确的剂量校正法。
The principle of precompensation for deformation was presented, which was applied to the shaping of an automobile fan and effectively helped lower the shrinkage deformation and warpage of the product.