all these multilayers are deposited by magnetron sputtering method on microcrystalline glass substrates.
采用磁控溅射方法,在微晶玻璃制备了多层膜。
the coatings deposited by magnetron sputtering technology have good corrosion and wear resistance. this technique shows optimistic development trend in the field of magnesium alloys surface treatment.
采用磁控溅射制备的合金表面膜层具有防腐蚀性能优异、耐磨性强等优点,其作为镁合金表面处理技术具有良好的发展趋势。
to improve the thickness uniformity of thin films deposited by magnetron sputtering process, the substrate is rotated off its axis in relation to magnetron target.
溅射原子的角分布、溅射环的宽度以及膜厚均匀性要求都会影响该线性关系。