Phosphorus doping degenerates the crystalline ratio of deposited film but benefits recrystallization.
磷掺杂导致沉积时晶化率降低,但对固相晶化有利。
In addition, the deposited film needs no annealing treatment, so that the present invention has also the advantages of low cost, simple preparation, etc and is suitable for future application.
此外,沉积后的薄膜无需进行后退火处理,所以它还具有成本低,制备简单等优点,适用于未来的生产。
The four-point-bending method is a comparatively ideal method to evaluate the adhesion strength Of vapor deposited film to matrix is given in this paper.